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MEMS Mass Sensor


MEMS Mass Sensor

This MEMS mass sensor is was analyzed as a part of the the MS526 Final Project. The design of this sensor was based on the paper “Enhanced Sensitivity of Mass Detection using the First Torsional Mode of Microcantilevers” PDF.

Resources

  1. MS526 Presentation PPT PDF.
  2. COMSOL & MATLAB Analysis Files Github.